Three Zone Split Tube Furnace (Cvd)

• Number of zone :One/Two /Three Zone (as per user requirement)
• Heating temperature range : Upto1200  C/1400 C
• Heating Element: A-1/Silicon Carbide
• Temperature accuracy :  1 C
• Furnace tube size : ID = 60 mm  /OD =65mm/ length= 1200  mm
• Quartz tube with couplers :High purity fused quartz
• Size:ID =60mm, OD=65mm,length=1200mm

Flanges: Stainless steel 304 flanges on both ends, these are high vacuum flanges with double silicon O  ring and metal ring. On one and provision for gas purging through valve and hinge door or ease of placing sample. At other end vacuum KF-25 connection for vacuum pump, KF-10 connection for vacuum gauge and release valve

• Heating rate : 15 C per  Minute (max.) or user settable Each Hot Zone length : 200  mm length
• Display : 7 LCD Touch Screen HMI to control all vital operation of CVD i.e. temperature and gas flow. With Data logging of temperature and gas flow.
• Construction : Horizontal and split type
• Insulation : Vacuum formed Zirconia fiber
• Shell Construction : MS body fabricated from 20/18 gauge sheet, powder coated for superior finish. Double layer body for low surface temp.
• Temperature control : ( 1x16=16 segment) PID programmable Digital Temperature controller x 3 no. (separate for each zone)
• Temperature sensor : 3 numbers (k type-1200 C/R type-1400 C)
• Power control : Through the phase angle controlled SSRUnit/Thyristor Unit

Vacuum pump and gauge : In the range of 10-2  mbar by using Direct of Drive   Rotary  pump of capacity 200ltr/min with SS bellow andAnalogue Pirani Gauge Range 0.5 mbar to 10-3mbar with sensor having KF-10fitting. (Optional)

Gas purging arrangement

• Digital vacuum gauge wih vacuum display upto 10-6 torr.
• Gas mixing chamber : One unit kept between the Rotameters and the furnace
• Furnace stand to height of 1 meter

Safety: Over current and short current protection,Thermocouple break   down alarm, high  temperature alarm.

OPTIONAL:-

• Chiller with Circulation Pump
• Gas Cylinder with Regulator
• Mass flow controller for different gases, flow rate upto 500 sccm or as required with digital display (Optional)
• Rotameter for different gases with needle valve.
• Centrifuges ystems